Diameter
| 2"
| 3"
| 4"
| 5"
| 6"
| | Grade | Prime | | Growth Method | CZ,F(xiàn)Z
| | 625Orientation | <1-0-0>,<1-1-1>
| | Type/Dopant | Intrinsic, P Type/Boron,N Type/Phos,N Type/As,N Type/Sb
| | Thickness (um) | 279
| 380 | 525 | 625 | 675 | | Thichness Tolerance | Standard ±25um, Maximum Capabilities ±5um | | Oxide Thickness | 100-1000nm | | Resistivity | 0.001-10000ohm-cm | | Surface Finished | P/E,P/P | | TTV (um) | Standard < 10um | | Bow/Warp (um) | Standard < 40um | | Particle | <10@0.5um;<10@0.3um |
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